Development engineer wafer particle contamination EUV
Veldhoven, Netherlands
6 dagen geleden

The EUV Wafer Defectivity group is responsible for optimizing the system’s performance by providing the means and methods to prevent, detect, analyze, predict, control and eliminate particle contamination sources in the scanner.

Furthermore, the group must ensure that designs of tools and systems are fit for industrial use.

Job Description

Each EUV system as a whole must be such that the particle levels on the reticle, wafers, optics and sensors are according to specification.

During assembly and integration of the systems, in our factory and at customers, issues arise and need to be solved. On top of this, new developed systems require ever improving performance.

The Development engineer wafer particle contamination EUV must be able to identify issues or areas of improvement by collecting and analysis of system performance data in combination with system configuration and use case information.

Goal is to create and explore proposals for developments and improvements. The challenge is to force design changes and optimizations into work packages and support their execution by the required projects.

To do so, the engineer must have, or must be able to learn, thorough system and module knowledge, knowledge of particle generation processes (tribology, materials, coatings, vacuum), particle transport processes (gas flows, inertia) and particle deposition processes (adhesion, bonding).

Last but not least a good dose of common sense is needed.

This combination of skills will enable the engineer to improve system performance and solve issues and by doing so the he or she will make a valuable contribution to our projects and customers.


Education levelMasters in physics, mechanical or chemical engineering.


  • Industrial experience in multi-disciplinary projects
  • Can work in a mix of troubleshooting a complex system in parallel with running investigations to make it perform better (hands-on combined with analytical work)
  • Is familiar with contamination control , preferably within ASML
  • Experience with statistical analysis is a plus
  • Affinity with mechanical design / tribology is a plus
  • Affinity with materials analysis is a plus
  • Experience with customer contact
  • You can filter root-causes out of complex datasets, and explain it to the other engineers in the team.
  • Personal skills

  • Strong analytical ability with a pragmatic attitude
  • Curious, willing to learn new things
  • You can work independently in a dynamic, explorative environment, as well as in a team
  • Highly committed and flexible (sometimes working outside office hours, changing requirements and boundary conditions)
  • Robust personality while being a team player is a must.
  • Context of the position

    The holder of the position reports to the group leader EUV Wafer Defectivity and is operational within multidisciplinary projects.

    Other information

    Willing to travel, several times per year (USA, Asia).

    ASML creates theconditions that enable you to realize your full potential. We providestate-of-the-art facilities, opportunities to develop your talents,international career opportunities, a stimulating and inspiring environment,and most of all, the commitment of a company that recognizes and rewardsoutstanding performance.

    Please add your complete & recent CV and motivation letter for thisposition to your application.

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