The EUV Wafer Defectivity group is responsible for optimizing the system’s performance by providing the means and methods to prevent, detect, analyze, predict, control and eliminate particle contamination sources in the scanner.
Furthermore, the group must ensure that designs of tools and systems are fit for industrial use.
Each EUV system as a whole must be such that the particle levels on the reticle, wafers, optics and sensors are according to specification.
During assembly and integration of the systems, in our factory and at customers, issues arise and need to be solved. On top of this, new developed systems require ever improving performance.
The Development engineer wafer particle contamination EUV must be able to identify issues or areas of improvement by collecting and analysis of system performance data in combination with system configuration and use case information.
Goal is to create and explore proposals for developments and improvements. The challenge is to force design changes and optimizations into work packages and support their execution by the required projects.
To do so, the engineer must have, or must be able to learn, thorough system and module knowledge, knowledge of particle generation processes (tribology, materials, coatings, vacuum), particle transport processes (gas flows, inertia) and particle deposition processes (adhesion, bonding).
Last but not least a good dose of common sense is needed.
This combination of skills will enable the engineer to improve system performance and solve issues and by doing so the he or she will make a valuable contribution to our projects and customers.
Education levelMasters in physics, mechanical or chemical engineering.
Context of the position
The holder of the position reports to the group leader EUV Wafer Defectivity and is operational within multidisciplinary projects.
Willing to travel, several times per year (USA, Asia).
ASML creates theconditions that enable you to realize your full potential. We providestate-of-the-art facilities, opportunities to develop your talents,international career opportunities, a stimulating and inspiring environment,and most of all, the commitment of a company that recognizes and rewardsoutstanding performance.
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